JPS6323704Y2 - - Google Patents

Info

Publication number
JPS6323704Y2
JPS6323704Y2 JP1985081409U JP8140985U JPS6323704Y2 JP S6323704 Y2 JPS6323704 Y2 JP S6323704Y2 JP 1985081409 U JP1985081409 U JP 1985081409U JP 8140985 U JP8140985 U JP 8140985U JP S6323704 Y2 JPS6323704 Y2 JP S6323704Y2
Authority
JP
Japan
Prior art keywords
pellicle
mask
pellicle frame
view
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985081409U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6258455U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985081409U priority Critical patent/JPS6323704Y2/ja
Publication of JPS6258455U publication Critical patent/JPS6258455U/ja
Application granted granted Critical
Publication of JPS6323704Y2 publication Critical patent/JPS6323704Y2/ja
Expired legal-status Critical Current

Links

JP1985081409U 1985-05-30 1985-05-30 Expired JPS6323704Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985081409U JPS6323704Y2 (en]) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985081409U JPS6323704Y2 (en]) 1985-05-30 1985-05-30

Publications (2)

Publication Number Publication Date
JPS6258455U JPS6258455U (en]) 1987-04-11
JPS6323704Y2 true JPS6323704Y2 (en]) 1988-06-29

Family

ID=30933117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985081409U Expired JPS6323704Y2 (en]) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPS6323704Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5668346B2 (ja) * 2010-07-14 2015-02-12 凸版印刷株式会社 ペリクルのフォトマスクへの取り付け構造
JP5984187B2 (ja) * 2013-04-22 2016-09-06 信越化学工業株式会社 ペリクルとフォトマスクのアセンブリ
EP4286941A3 (en) * 2014-11-17 2024-03-06 ASML Netherlands B.V. Pellicle attachment apparatus
JP2017083791A (ja) * 2015-10-30 2017-05-18 三井化学株式会社 ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法

Also Published As

Publication number Publication date
JPS6258455U (en]) 1987-04-11

Similar Documents

Publication Publication Date Title
EP0252673A2 (en) Removable pellicle and method
JP5051840B2 (ja) ペリクル収納容器内にペリクルを保管する方法
CA2070257C (en) Optical pellicle holder
US6573980B2 (en) Removable optical pellicle
JPS6323704Y2 (en])
DE3885003D1 (de) Filmherstellungverfahren und Einstellvorrichtung dazu.
JP4173239B2 (ja) リソグラフィー用ペリクル
JP4202554B2 (ja) 半導体リソグラフィ用ペリクル
TW201820030A (zh) 表膜結構體、表膜收納體及固定方法
KR20060047206A (ko) 페리클 프레임 및 그것을 이용한 포토리소그래피용 페리클
JPH0324547A (ja) マスク保護用ペリクル
US6340541B1 (en) Mask for recycling and fabrication method thereof
JPS6325657B2 (en])
JPH05216214A (ja) フォトマスク及びペリクル
JP3427241B2 (ja) ペリクルのフォトマスクへの貼着構造
JPH04268557A (ja) ペリクル
JPH0745081Y2 (ja) ペリクル構造体
JPH084677Y2 (ja) パネルプロテクタ
JPH09106066A (ja) ペリクルライナーの剥離方法
JPH0650077U (ja) 表示制御装置
JP2001033943A (ja) マスク装置
JPH075678A (ja) 露光用マスクの製造方法及びその装置
JP3041760U (ja) 大型ペリクル
JPH1020480A (ja) フォトマスクへのペリクル貼着方法
KR940002975A (ko) 점착제를 이용하여 레티클/마스크면에 보호막을 부착시키는 방법